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Please use this identifier to cite or link to this item: http://repository.ukwk.ac.id/handle/123456789/104
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dc.contributor.authorN. T, Redationo-
dc.contributor.authorK, Mizhusima-
dc.contributor.authorT, Aizawa-
dc.contributor.authorD.J.H, Santjoyo-
dc.date.accessioned2018-10-25T00:56:41Z-
dc.date.available2018-10-25T00:56:41Z-
dc.date.issued2013-03-
dc.identifier.urihttp://repository.ukwk.ac.id/handle/123456789/104-
dc.language.isoen_USen_US
dc.publisherSouth East Asian Technical University Consortium (SEATUC)en_US
dc.titleDry Plasma Etching for Micro-Paterning Onto the DLC Coatingen_US
dc.typeArticleen_US
Appears in Collections:International Proceeding

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