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Browsing by Subject Etching Rate
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| Issue Date | Title | Author(s) |
|---|---|---|
| 2014-02 | Utilization of Oxygen Plasma For Plasma Ashing and Etching Process | Redationo, Nereus Tugur; Soenoko, Rudy; Santjoyo, Dionysius Joseph Herry; Irawan, Yudy Surya |