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Browsing by Subject Oxygen Plasma Etching
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| 2013-03 | Micro-Imprinting onto DLC and CNT Coatings via High Density Oxygen Plasma Etching | T, Aizawa; K, Mizushima; T. N, Redationo; M, Yang |