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UKWK Institutional Repository
Browsing by Subject Plasma Etching
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Showing results 1 to 2 of 2
Issue Date
Title
Author(s)
2013-10
Precise Micro-Texturing onto DLC Coating via High-Density Oxygen Plasma Etching
Aizawa, Tatsuhiko
;
Redationo, Nereus Tugur
;
Mizushima, Kento
2014-02
Utilization of Oxygen Plasma For Plasma Ashing and Etching Process
Redationo, Nereus Tugur
;
Soenoko, Rudy
;
Santjoyo, Dionysius Joseph Herry
;
Irawan, Yudy Surya
