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Please use this identifier to cite or link to this item: https://repository.ukwk.ac.id/handle/123456789/104
Title: Dry Plasma Etching for Micro-Paterning Onto the DLC Coating
Authors: N. T, Redationo
K, Mizhusima
T, Aizawa
D.J.H, Santjoyo
Issue Date: Mar-2013
Publisher: South East Asian Technical University Consortium (SEATUC)
URI: http://repository.ukwk.ac.id/handle/123456789/104
Appears in Collections:International Proceeding

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