Micro-Imprinting onto DLC and CNT Coatings via High Density Oxygen Plasma Etching

Abstract

Carbon-based coatings such as DLC (Diamond-like carbon) and CNT (Carbon Nano-Tube) films have been noticed as a structural and functional substrate for micro-forming. First, DLC-coated and CNT-coated silicon substrates were prepared to investigate the micro-imprinting behavior via the high density oxygen plasma etching process. This etching process was also studied by quantitative plasma diagnosis with respect to activated oxygen species and electron density. By using the micro-groove patterning, the etching behavior as well as etching rates, were discussed toward advancement in homogeneous and fast-rate etching. In second, micro-textured DLC-coating was employed as a mother tool for micro- embossing to duplicate these micro-textures onto the aluminum sheets via table-top CNC-stamping system.