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Issue Date
Title
Author(s)
2013-03
Dry Plasma Etching for Micro-Paterning Onto the DLC Coating
N. T, Redationo
;
K, Mizhusima
;
T, Aizawa
;
D.J.H, Santjoyo
2011-10
Plasma Etching with Metallic Masking for Micro-Patterning onto DLC Coated Mold-Dies
T, Aizawa
;
N. T, Redationo
;
E. E, Yunanta
2013-03
Micro-Imprinting onto DLC and CNT Coatings via High Density Oxygen Plasma Etching
T, Aizawa
;
K, Mizushima
;
T. N, Redationo
;
M, Yang
2012-03
Plasma Diagnosis In Etching and Ashing of Diamond Carbon Coating
E. E, Yunanta
;
T, Aizawa
;
N. T, Redationo
2012-03
Plasma Micro-Patterning Onto Diamond Like Carbon Coating
N.T, Redationo
;
T, Aizawa
;
E. E, Yunanta
Discover
Author
3
E. E, Yunanta
3
N. T, Redationo
1
D.J.H, Santjoyo
1
K, Mizhusima
1
K, Mizushima
1
M, Yang
1
N.T, Redationo
1
T. N, Redationo
Subject
1
CNT
1
DLC
1
Mold-die. Micro-embossing
1
Oxygen Plasma Etching
1
Plasma Diagnosis
Date issued
2
2012
2
2013
1
2011
Has File(s)
5
true