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UKWK Institutional Repository
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2. Lecture Papers
Jurnal Nasional Terakreditasi
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Issue Date
Title
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2020-03
Analisa Desain dan Perancangan Ruang Vakum Medium Sebagai Media Pembangkitan Plasma Oksigen Menggunakan Gelombang Mikro 2,45 GHZ
Permana, Antonius Prisma Jalu
;
Murdiyanto, Danang
;
Mbulu, Bernardus Crisanto Putra
2018-10
Rancang Bangun Reaktor Plasma dan Studi Pengaruh Laju Alir Gas Oksigen Terhadap Laju Ashing Karbon pada Baja K110
Permana, Antonius Prisma Jalu
;
Mbulu, Bernardus Crisanto Putra
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Author
2
Mbulu, Bernardus Crisanto Putra
2
Permana, Antonius Prisma Jalu
1
Murdiyanto, Danang
Subject
2
gelombang mikro
1
ashing
1
frekuensi tinggi
1
ionisasi
1
mean free path
1
re-coating
1
vakum
Date issued
1
2018
1
2020